MINUTE DEVICES AND INTEGRATED SYSTEMS FOR PARTICLE SIZE DETECTION, SEPARATION AND COLLECTION BASED ON LOW TEMPERATURE CO-FIRED CERAMIC (LTCC) TAPE TECHNOLOGY

摘要

Disclosed are minute inertial impactor devices which are comprised of ceramic tape. These devices can be stand-alone or incorporated into a unitary fluidic and mechanical component system containing various other elements, also preferably produced from ceramic tape. The impactor comprises a plurality of ceramic layers (1, 2, 3) and an impaction surface. The impaction surface can be fabricated in a planar, concave (43) or wedge-shaped (45) geometry, or surface treated to enhance collection efficiency. The devices of the present invention can be assembled in a series or parallel configuration.