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CONTROLLING BIREFRINGENCE IN AN OPTICAL WAVEGUIDE AND IN AN ARRAYED WAVEGUIDE GRATING
CONTROLLING BIREFRINGENCE IN AN OPTICAL WAVEGUIDE AND IN AN ARRAYED WAVEGUIDE GRATING
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机译:控制光学波导和阵列光栅中的双折射
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摘要
A method of controlling birefringence in a rib waveguide structure manufactured in silicon (1), the rib waveguide structure comprising an elongated rib element (4) having an upper face and two side faces, the method comprising forming a layer of thermal oxide (7) to a predetermined thickness on said upper face and side faces of at least a portion of said rib waveguide structure.
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