CONTROLLING BIREFRINGENCE IN AN OPTICAL WAVEGUIDE AND IN AN ARRAYED WAVEGUIDE GRATING

摘要

A kind of control is birefringent to make silicon (1) in ridge waveguide component, rib shape waveguiding structure includes that an elongated elements (4) has a upper surface and two side faces, this method includes forming one layer of thermal oxide (7) to predetermined thickness, the method for at least part rib shape waveguiding structure on the upper surface and side.