Optomechanical microdevice and optomechanical microdeflector using the same

摘要

The device has a fixed part or substrate (2) whose surface (3) defines the plane (x,y) in which its moving part can be actuated to deflect a beam of light. The microlens (4) is attached to the fixed part by preferably two arms (6,8) which can be displaced in the y direction by means of pairs of electrodes (12,14;16,18). The beam is introduced through a micro-waveguide (10) in the x direction. The displacement can be effected alternatively by a magnetic field perpendicular to the plane, exerting a Laplacian force on conductors of current along the arms.