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STAMPER-SUPPORTING MOLD COATED WITH DIAMOND-LIKE CARBON FILM FOR MOLDING DATA-RECORDING DISKS AND ITS MANUFACTURING METHOD
STAMPER-SUPPORTING MOLD COATED WITH DIAMOND-LIKE CARBON FILM FOR MOLDING DATA-RECORDING DISKS AND ITS MANUFACTURING METHOD
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机译:镶有类金刚石膜的压模模具,用于制造数据记录盘及其制造方法
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摘要
The present invention relates to a diamond-like carbon film is coated with an information recording disk molding stamper for supporting the mold and a method of manufacturing the same, is a stamper to transfer a certain shape on the disk, in close contact with the stamper, and to support the stamper from the lower portion of the stamper stamper supporting mold and, with a predetermined space above the stamper above, move up and down as possible press mold and is formed in a periphery of the stamper and the information recording disc molding which comprises a ring, which is in close contact with the stamper, and stamper supporting mold in the apparatus, the stamper supporting mold stamper and the amorphous silicon layer is formed on the abutting surfaces and to form a-like carbon film first diamond with high hardness formed on the amorphous silicon layer of the first diamond-like carbon film hardness is low above the second particular in that the diamond-like carbon film is formed A diamond-like carbon film-coated information storage disc for supporting a mold forming a stamper and that provides a method for manufacturing the same.
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