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STAMPER-SUPPORTING MOLD COATED WITH DIAMOND-LIKE CARBON FILM FOR MOLDING DATA-RECORDING DISKS AND ITS MANUFACTURING METHOD
STAMPER-SUPPORTING MOLD COATED WITH DIAMOND-LIKE CARBON FILM FOR MOLDING DATA-RECORDING DISKS AND ITS MANUFACTURING METHOD
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机译:镶有类金刚石膜的压模模具,用于制造数据记录盘及其制造方法
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摘要
The present invention relates to a stamper paper mold for forming an information recording disk coated with a diamond-like carbon film, and a manufacturing method thereof, comprising: a stamper for transferring a certain shape to a disk, and a stamper that is in close contact with the stamper and supports the stamper at the bottom of the stamper. An information recording disk molding comprising a stamper mould, a press mold movable up and down with a predetermined space on the stamper, and a ring formed around the stamper and in close contact with the stamper and stamper mould. In the apparatus, the stamper-type die has an amorphous silicon layer formed on a surface in contact with the stamper, and forms a first diamond-like carbon film on the amorphous silicon layer and a lower hardness on the first diamond-like carbon film. 2 diamond-like carbon film is formed It provides a diamond-like carbon film-coated information storage disc for supporting a mold forming a stamper and a method for manufacturing the same that.
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