SOFT MAGNETIC FILM AND THIN FILM MAGNETIC HEAD PLANAR MAGNETIC ELEMENT AND FILTER USING THIS SOFT MAGNETIC FILM

摘要

By the addition of Ti to the -O-alloy Fe-M (Zr, Hf, Ta, etc.) and provides a soft magnetic film capable of reducing the magnetostriction constant. Further, the addition amount of Ti enough to 0.1 at% to 2 at%, and a member stamp Fe, Hf, by appropriately adjusting the compositional ratio of O kites, to obtain excellent soft magnetic properties, the magnetostrictive constant and at the same time can be reduced magnetic It provides film.