Thermal type infrared ray detector with thermal separation structure for high sensitivity

摘要

The present invention relates to a thermal type infrared ray detector having a thermal separation structure comprising a plurality of picture elements. Each of the plurality of image elements includes a circuit formed in the substrate for all the image elements, and a light receiving unit for converting infrared rays into resistance change or charge quantity change. The circuit generates a voltage signal from the resistance change or the charge amount change. A beam mechanically supports the light receiving portion from the substrate to form a gap between the substrate and the light receiving portion, and electrically connects the light receiving portion to the circuit. The beams each include a wiring film formed of a Ti alloy to connect the light receiving unit to the circuit, and a protective insulating film surrounding the wiring film. In this case, the Ti alloy may be TiAl6V4.