Thermal type infrared ray detector with thermal separation structure for high sensitivity

摘要

PURPOSE: A thermal infrared detector having thermal separation structure is provided to improve sensitivity of a detector by selecting optimum material. CONSTITUTION: A detector comprises a diaphragm(4) which is a light-receiving part supported on a substrate(1) and a read-out circuit corresponding to a picture element, installed on the substrate(1), and the light-receiving part(4) is formed from a thin film(6) formed from bolometer material and an electrode, and the electrode and the read-out circuit are connected electrically each other by a connecting thin film(11), and the connecting thin film(11) is formed out of a Ti alloy. The Ti alloy is preferably TiAl6V4. The light-receiving part is supported on the substrate(1) through a beam(3), and an air gap(2) is formed between the light-receiving part and the substrate(1), and the connecting thin film(11) is passed through the inside of the beam(3). A sensitivity 1.24 times as high as the maximum sensitivity conventionally obtained can be obtained by using the Ti alloy.