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Method and device for separating single crystals, adjusting device and test method for determining an orientation of a single crystal for such a method

机译:分离单晶的方法和装置,用于确定单晶取向的调节装置和测试方法

摘要

The invention relates to a method for cutting single crystals, especially GaAs single crystals. According to the invention, a single crystal (1) to be cut into at least two parts and a cutting tool (2, 3; 8, 8a, 8b, 8c) can be moved in relation to each other in an advance direction (V), the single crystal (1) being oriented in such a way that a defined crystallographic direction (K) can be found in the cutting plane (T). The inventive method is characterised in that an angle rho between the defined crystallographic direction (K) and the advance direction (V) is chosen in such a way that forces acting on the cutting tool perpendicularly to the cutting plane during the cutting process compensate for each other.
机译:本发明涉及一种切割单晶的方法,尤其是GaAs单晶。根据本发明,可以被切割成至少两部分的单晶(1)和切割工具(2、3; 8、8a,8b,8c)可以沿前进方向(V)相对于彼此移动。 ),单晶(1)的取向应使在切割平面(T)中可以找到确定的结晶方向(K)。本发明的方法的特征在于,以如下方式选择限定的晶体学方向(K)和前进方向(V)之间的角度rho,使得在切割过程中垂直于切割平面作用在切割工具上的力补偿每个其他。

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