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Method and device for cutting single crystals, in addition to an adjusting device and a test method for determining a crystal orientation

机译:除了用于确定晶体取向的调节装置和测试方法以外,还用于切割单晶的方法和装置

摘要

The present invention relates to a method for severing single crystals (1), especially GaAs single crystals by cutting. According to the invention, a single crystal (1) to be cut into at least two parts and a cutting tool (2, 8) can be moved in relation to each other in an advance direction (V), the single crystal (1) being oriented in such a way that a defined crystallographic direction (K) can be found in the cutting plane (T). The inventive method is characterised in that an angle (ro) between the defined crystallographic direction (K) and the advance direction (V) of the cutting tool (2, 8) is chosen in such a way that forces acting on the cutting tool (2, 8) perpendicularly to the cutting plane (T) during the cutting process compensate for each other.
机译:用于切割单晶(1)的方法技术领域本发明涉及一种通过切割来切割单晶(1)的方法,尤其是GaAs单晶。根据本发明,待切割成至少两部分的单晶(1)和切割工具(2、8)可以沿前进方向(V)相对于彼此移动,该单晶(1)以这样的方式定向:在切割平面(T)中可以找到确定的结晶方向(K)。本发明的方法的特征在于,以这样的方式选择限定的晶体学方向(K)和切削工具(2、8)的前进方向(V)之间的角度(ro):在切割过程中,垂直于切割平面(T)的图2、8)相互补偿。

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