首页>
外国专利>
Porous structure production used for sieve or filter comprise anodizing silicon substrate to form porous silicon layer
Porous structure production used for sieve or filter comprise anodizing silicon substrate to form porous silicon layer
展开▼
机译:用于筛子或过滤器的多孔结构生产包括阳极氧化硅基板以形成多孔硅层
展开▼
页面导航
摘要
著录项
相似文献
摘要
Production of a porous structure comprises anodizing a silicon substrate (1) to form a porous silicon layer (2). An Independent claim is also included for the porous structure produced. Preferred Features: The substrate is anodized using an aqueous HF solution and applying a voltage between the substrate and an electrode or between two electrodes. The substrate is provided with a structured mask before being anodized, preferably in the edge region of the substrate.
展开▼