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Formation and Evaluation of Silicon Substrate with Highly-Doped Porous Si Layers Formed by Metal-Assisted Chemical Etching

机译：用金属辅助化学蚀刻形成高掺杂多孔Si层的硅衬底的形成与评价

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Yijie Li; Nguyen Van Toan; Zhuqing Wang; Khairul Fadzli Bin Samat; Takahito Ono;
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1. Spectroscopic Characterization of Silicon Wire-Like and Porous Nanolayers in the Process of Metal-Assisted Chemical Etching of Single-Crystal Silicon [J] . Zharova Yuliya, Ermina Anna, Pavlov Sergey, Physica status solidi . 2019,第17期

机译：单晶硅金属辅助化学刻蚀过程中像硅丝和多孔纳米层的光谱表征
2. Porous Silicon Formation by Metal-Assisted Chemical Etching [J] . M. LIPINSKl, J. CICHOSZEWSKI, R.P. SOCHA, Acta Physica Polonica . 2009,第suppla期

机译：金属辅助化学腐蚀形成多孔硅
3. Blue luminescence from porous layers produced by metal-assisted chemical etching on low-doped silicon [J] . Hadjersi T, Gabouze N, Yamamoto N, Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology . 2005,第4期

机译：低掺杂硅上金属辅助化学蚀刻产生的多孔层的蓝色发光
4. The Formation of Porous Structure in Silicon by the Methods of Metal-Assisted Chemical Etching and Electrochemical Etching [C] . Konstantin V. Krukovskii, Oleg A. Kashin, Alexander I. Lotkov International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures . 2019

机译：用金属辅助化学蚀刻和电化学蚀刻形成硅中多孔结构的形成
5. Development of metal-assisted chemical etching of silicon as a 3D nanofabrication platform. [D] . Hildreth, Owen James. 2012

机译：作为3D纳米制造平台的硅金属辅助化学蚀刻的开发。
6. Formation and Evaluation of Silicon Substrate with Highly-Doped Porous Si Layers Formed by Metal-Assisted Chemical Etching [O] . Yijie Li, Nguyen Van Toan, Zhuqing Wang, 2021

机译：用金属辅助化学蚀刻形成高掺杂多孔Si层的硅衬底的形成与评价
7. Engineering Silicon to Porous Silicon and Silicon Nanowires by Metal-Assisted Chemical Etching: Role of Ag Size and Electron-Scavenging Rate on Morphology Control and Mechanism [O] . Kanakaraj Rajkumar, Ramanathaswamy Pandian, Amirthapandian Sankarakumar, 2017

机译：通过金属辅助化学蚀刻工程硅到多孔硅和硅纳米线：ag尺寸和电子清除率对形态控制和机理的影响
8. Formation of Porous Surface Layers in Reaction Bonded Silicon Nitride During Processing [R] . Shaw, N. J., Glasgow, T. K. 1979

机译：反应键合氮化硅在加工过程中形成多孔表面层

Formation and Evaluation of Silicon Substrate with Highly-Doped Porous Si Layers Formed by Metal-Assisted Chemical Etching

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