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Chemical vapor deposition reactor has internal and external plasma generators to ionize and create free radicals in cleaning gases passed through
Chemical vapor deposition reactor has internal and external plasma generators to ionize and create free radicals in cleaning gases passed through
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机译:化学气相沉积反应器具有内部和外部等离子体发生器,可在通过的清洁气体中电离并产生自由基
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摘要
The reaction chamber (1) includes a wall (9), gas supply inlet (5) and outlet (7), and plasma generator (2) producing plasma in the chamber. It also includes an external plasma generation chamber (3) connected by the chamber inlet (5) to the reaction chamber. An independent claim is included for the corresponding method.
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