Arrangement for generating short-wave ultraviolet radiation has discharge chamber in which ultraviolet radiation is obtained from hydrogen discharge, high vacuum chamber with target object

摘要

The arrangement has a discharge chamber (1) in which ultraviolet radiation is obtained from a hydrogen discharge stimulated by electrons and a high vacuum chamber (2) in which ultraviolet radiation (6) is directed at a target object. A pressure of greater than 10-2 is present in the discharge chamber and less than 10-5 in the high vacuum chamber. A passage (3) for ultraviolet radiation is arranged between the chambers.