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Device for coating a flat substrate used in the production of flat TV screens with organic illuminating diodes comprises a fixed vaporizer source for vaporizing materials
Device for coating a flat substrate used in the production of flat TV screens with organic illuminating diodes comprises a fixed vaporizer source for vaporizing materials
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机译:用有机发光二极管涂覆用于平板电视屏幕的平板基板的设备,包括用于蒸发材料的固定蒸发器源
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摘要
Device for coating a flat substrate (9) comprises a fixed vaporizer source (28) for vaporizing materials used to coat the substrate; a drive which moves the substrate relative to the vaporizer source; a first distributor (40) which linearly distributes vapor released by the vaporizer source; and a second distributor (46) arranged with one end close to the vaporizer source. Preferred Features: The distributor are quartz tubes each surrounded by a ceramic sleeve (52, 58). The sleeve surrounding the first distributor consists of two halves provided with holes linearly arranged. One of the distributors is indirectly heated.
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