Device for coating a flat substrate used in the production of flat TV screens with organic illuminating diodes comprises a fixed vaporizer source for vaporizing materials

摘要

Device for coating a flat substrate (9) comprises a fixed vaporizer source (28) for vaporizing materials used to coat the substrate; a drive which moves the substrate relative to the vaporizer source; a first distributor (40) which linearly distributes vapor released by the vaporizer source; and a second distributor (46) arranged with one end close to the vaporizer source. Preferred Features: The distributor are quartz tubes each surrounded by a ceramic sleeve (52, 58). The sleeve surrounding the first distributor consists of two halves provided with holes linearly arranged. One of the distributors is indirectly heated.