Vaporizer device, used in coating plant for coating plate-like/band-shaped substrates e.g. glass panes, comprises vapor sources that is adapted for evaporation of coating material and connected vapor outlet and comprises vapor outlet tube

摘要

The vaporizer device comprise vapor sources (1) for evaporation of a coating material. The vapor source is connected to a vapor outlet (5), and comprises a vapor outlet tube (5) with vapor exhaust openings space apart from each other. A vapor manifold is arranged between the vapor sources and vapor outlet tube, which is connected to vapor outlet tube by a vapor inlet (2) of vapor sources and a vapor communication port with vapor exhaust openings. A conductance of vapor manifold is greater than a conductance of the vapor outlet tube. The vaporizer device further comprises a vacuum chamber. The vaporizer device comprise vapor sources (1) for evaporation of a coating material. The vapor source is connected to a vapor outlet (5), and comprises a vapor outlet tube (5) with vapor exhaust openings space apart from each other. A vapor manifold is arranged between the vapor sources and vapor outlet tube, which is connected to vapor outlet tube by a vapor inlet (2) of vapor sources and a vapor communication port with vapor exhaust openings. A conductance of vapor manifold is greater than a conductance of the vapor outlet tube. The vaporizer device further comprises a vacuum chamber arranged in a coating plant for coating substrates (7). The vacuum chamber includes a transportation unit for transport of the substrates in a direction. A center axis of the vapor manifold and a central axis the vapor outlet tube are arranged such that the center axis of vapor outlet tube has a length greater than the center axis of the at vapor manifold and is offset in the substrate transport direction. A sum of a conductance (CA1) of the vapor communication port, conductance (CA2) of vapor exhaust openings and a sum of the conductance (CD1) of the vapor manifold and the conductance (CD2) of the vapor outlet tube in the direction are expressed as 1/(1/CA1 + 1/CA2) less than (CD1 + CD2)/20. A number of (NA1) of the vapor communication ports and the sum of the conductance CA2 of vapor exhaust openings and the conductance CD2 of the vapor outlet tube are expressed as CA2 greater than (NA1x NA1x CD2)/20. The vapor outlet tube is connected to vapor manifold by the vapor communication port. An independent claim is included for a cover evaporator system for producing mixtures of two materials.