Optical object surface profile measurement involves comparing contents of all images per point to determine plane using defined criteria, associating plane number, storing in mask image

摘要

The method involves acquiring object (1) images in different planes (2) in the z direction, each plane containing a number of coordinate points, associating each image to a plane with a define number (N), relating each plane to a common coordinate system origin and producing a mask image by comparing the contents of all images at each point to determine the plane using defined criteria, associating the plane number and storing in the mask image. Independent claims are also included for the following: a method of optical measurement of object surface profiles.