Flow velocity capturing before the direction for a thermally flow sensor

摘要

It is a flow velocity capturing before the direction for a thermally flow sensor with a high reliability described. The device has a planar substrate (1) with a first and second through opening (10b, 10a), which are formed next to one another, an insulation protection film (2) which, by way of a main surface of the substrate (1) is designed in such a way that this the passage openings (10b, 10a), a fluid temperature measuring resistor (5), which comprises a thermally resistive film is formed which, at a point of the passage opening (10b) on the support film (2) with respect to the substrate (1), is positioned or arranged a heat generating resistor (4), which comprises a thermally resistance film is formed which, at a point of the second through opening (10a) on the support film (2) with respect to the substrate (1) is positioned, an insulation protection film (3), which is disposed in such a way that the fluid temperature measuring resistor (5) and the heat generating resistor (4) and an enhancing film comprises (6) which, for the fluid temperature measuring resistor (5) is provided. The enhancing film comprises is not for the heat generating resistor (4) is provided. The flow rate or, alternatively, the flow velocity of the fluid is with the use of the advantage of the phenomenon of the heat transfer to the fluid from the heat generating resistor (4) is measured.