Flow velocity capturing before the direction for a thermally flow sensor

摘要

Flow velocity capturing before the direction for a thermally flow sensor, comprising:a planar substrate (1) with a first and second through opening (10b, 10a), which are formed next to one another therein;an insulation support film (2) which, by way of a main surface of the substrate (1) is formed, so that the latter, the passage openings (10b, 10a) covers;a fluid temperature measuring resistor (5), which is produced by a thermally resistive film is formed which, at a point of the first through opening (10b) on the support film (2) with respect to the substrate (1) is positioned;a heat generating resistor (4), which comprises a thermally resistive film is formed which, at a point of the second through opening (10a) on the support film (2) with respect to the substrate (1) is positioned;an insulation protection film (3), which is positioned such that the fluid temperature measuring resistor (5) and the heat generating resistor covers (4); anda enhancing film comprises (6), which for the fluid temperature measuring resistor (5) is provided, wherein the enhancing film comprises (6) not for the heat generating resistor (4) is provided..