mikroejektionspumpe

摘要

The pump for generating microdrops consist of at least one pump chamber designed in a silicon chip and a silicon membrane located above the chamber that can be operated piezoelectrically. The pump chamber is connected to at least one feed channel and one outlet channel provided with a discharge opening and has a glass chip to seal off the chamber opposite the silicon membrane. The feed channel found in the silicon chip (2) in the direction of the pump chamber is designed at least partly as a diffusor element and the outlet channel opens out in an exit plane.