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capacitive pressure transducers with improved elektrodentru00e4ger

机译:改进型电子压力传感器的电容式压力传感器

摘要

The disclosed pressure transducer assembly includes metallic body, a diaphragm, a metallic plate, an insulator, and a conductor. The body defines an interior cavity. The diaphragm is mounted in the body and divides the interior cavity into a first chamber and a second chamber. A portion of the diaphragm flexes in a first direction in response to a pressure in the first chamber being greater than a pressure in the second chamber, and that portion of the diaphragm flexes in a second direction opposite the first direction in response to the pressure in the second chamber being greater than the pressure in the first chamber. The metallic plate is fixed to the metallic body in one of the first and second chambers. The insulator is also disposed in that chamber and is fixed to the metallic plate. The conductor is disposed on the insulator. The diaphragm and the conductor are characterized by a capacitance. The capacitance is representative of a difference between the pressures in the first and second chambers.
机译:所公开的压力传感器组件包括金属体,膜片,金属板,绝缘体和导体。主体限定内部空腔。隔膜安装在主体中,并将​​内部空腔分成第一腔室和第二腔室。响应于第一腔室中的压力大于第二腔室中的压力,隔膜的一部分沿第一方向挠曲,响应于第一腔室中的压力,隔膜的该部分沿与第一方向相反的第二方向挠曲。第二腔室大于第一腔室中的压力。金属板在第一腔室和第二腔室中的一个中固定到金属主体。绝缘体也设置在该室中,并固定在金属板上。导体布置在绝缘体上。膜片和导体的特征在于电容。电容表示第一腔室和第二腔室中的压力之间的差。

著录项

  • 公开/公告号DE69807876D1

    专利类型

  • 公开/公告日2002-10-17

    原文格式PDF

  • 申请/专利权人 MKS INSTRUMENTS INC. ANDOVER;

    申请/专利号DE1998607876T

  • 发明设计人 DENNER A.;

    申请日1998-06-04

  • 分类号G01L9/00;

  • 国家 DE

  • 入库时间 2022-08-22 00:24:46

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