Fabrication of a transmission modulator for deep ultraviolet micro-lithography by the deposition of a thin film of amorphous adamantine carbon under a variable polarisation

摘要

A method for the fabrication of a transmission modulator consists of obtaining an amorphous adamantine carbon using a plasma made up of a mixture of acetylene and argon and, sustained by the power of a source of micro-waves, depositing a thin film of this carbon on a substrate weakly absorbent in the deep ultraviolet to which is applied a variable polarisation to vary the interdict band by the control of the partial pressure of the argon and to thus vary the corresponding coefficient of extinction in order to modulate the transmission of the modulator without modifying the film deposited. An Independent claim is included for a transmission modulator for deep ultraviolet micro-lithography fabricated by this method.