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Cooling of a vacuum pump used in the semiconductor industry, uses proximity sensor to control the cooling of the stator in maintain the optimum play between stator and rotor
Cooling of a vacuum pump used in the semiconductor industry, uses proximity sensor to control the cooling of the stator in maintain the optimum play between stator and rotor
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机译:半导体行业中使用的真空泵的冷却,使用接近传感器控制定子的冷却,以保持定子和转子之间的最佳间隙
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摘要
The pump includes a proximity sensor (16) disposed in the stator (1) and adapted to detect the play (E) at the neighborhood of a control zone (17) between the stator and the rotor (4). The control zone is in or at the neighborhood of the critical zone (117) where the contact is most probable between the rotor and the stator during one evolution of temperature of the rotor and/or the stator. The signal produced by the sensor is used for controlling the cooling circuit of the stator, in order to maintain the play at a value greater to the minimum admissible value.
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