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Optical filter thin layer deposition method having thin deposition layers several substrates deposited and luminous beams produced optically controlling substrate thickness
Optical filter thin layer deposition method having thin deposition layers several substrates deposited and luminous beams produced optically controlling substrate thickness
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机译:滤光器薄层沉积方法,其具有薄的沉积层,沉积了多个基板并且产生了光束以光学方式控制基板厚度
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摘要
The deposition mechanism (27) deposits thin layers (35,36) on several substrates (10,11). Luminous beams (31,31a,31b, 32a) are produced providing optical substrate thickness control.
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