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Complex dielectric thin film of lead zirconate titanate is formed on a metal foil
Complex dielectric thin film of lead zirconate titanate is formed on a metal foil
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机译:在金属箔上形成锆钛酸铅的复合电介质薄膜
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摘要
(57) dielectric constant is high, the complex [summary] [challenge] crystalline dielectric thin film of lead zirconate titanate is formed on SOLUTION: A metal foil on, than 5% (loss tangent dielectric loss less) less, leakage current is small. Lead zirconate titanate, and is represented by the formula PbZr x Ti y O z in (PZT), the above formula, about 0.35 to about 0.65, y and x is from about 2.5 to about z is independently is 5.0. Dielectric thin film composite, including that it can be produced using sol-gel method, chemical vapor deposition and sputtering deposition method to form a PZT thin film on the foil brass, platinum, titanium and stainless steel are out.
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机译:(57)介电常数高,在其上形成钛酸锆酸铅的复杂[概述] [挑战]晶体介电薄膜。解决方案:在金属箔上,比5%(损耗角正切介电损耗少)少,漏电流小。锆钛酸铅,由(PZT)中的公式PbZr x Sub> Ti y Sub> O z Sub>表示,上式约为0.35至0.65,y和x为约2.5至约z,独立地为5.0。介电薄膜复合材料,包括可以通过溶胶-凝胶法,化学气相沉积和溅射沉积法生产的复合薄膜,可以在黄铜,铂,钛和不锈钢箔上形成PZT薄膜。
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