PROBLEM TO BE SOLVED: To efficiently generate torque even in the case of a compact shape with several mm diameter, by correcting frequency by cutting and machining a piezoelectric body using, for example, laser beams, and reducing the scattering of the resonance frequency of a plurality of flex vibrators. ;SOLUTION: A compact rotary type actuator is constituted of a magnet 6, a flex vibrator 2, a rotator 1, and a rotary shaft 7. The actuator has a diameter of approximately 2 mm, the magnet 6 and the rotator 1 are machined in cylindrical and discoidal shapes due to cutting machining, and the material is made of non-magnetic stainless steel. The flex vibrator 2 and the magnet 6 are joined 6y the brazing method, the material of the rotary shaft 7 is steel, and the surface is subjected to fluororesin coating treatment. An electrostrictive element 3 for driving the flex vibrator 2 is cut and machined accurately by convergence beams such as laser beams, thus effectively correcting the scattering of the resonance frequency of the flex vibrator 2.;COPYRIGHT: (C)1998,JPO
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