Minute vibrating detection device and minute vibrating control unit

摘要

PROBLEM TO BE SOLVED: To provide a small oscillation detecting device with high mechanical reliability capable of detecting a three dimensional small oscillation.;SOLUTION: This small oscillation detecting device has a superconductor and a magnetic circuit for floating the superconductor by a magnetic field, and it detects an optical position of the floating superconductor. It is characterized by that it has a coherent light source, a reflector provided in the superconductor, a reference reflector provided in the magnetic circuit, an optical system irradiating light from the light source to each reflector, an optical system effectively modulating a frequency of one of the reflected lights from the reflectors in a spatial direction, an image pickup means picking up an interference pattern of modulated light and unmodulated light, a processing means processing an output of the image pickup means and converting it into a signal indicating the optical position of the superconductor, and a control means controlling the magnetic force of the magnetic circuit on the basis of an output of the processing means.;COPYRIGHT: (C)2002,JPO