Removal manner and removal device null of substrate edge

摘要

PURPOSE: To suppress the amount used of the used solvent, and remove effectively a film of a substrate end part. ;CONSTITUTION: A removing unit 10 comprises a removing unit body 11, and a piping connecting with a solvent storing part is provided in this removing unit body 11, and also a head 12 is provided in an upper portion of the removing unit body 11, and a space 13 is formed ranging in the horizontal direction in this head 12, and faces solvent supply openings 14a, 14b. Arms 15, 16 are fitted on to the left and right side surfaces of the head 12, and slits 17, 18 open directing to a substrate are formed on these arms 15, 16, and further an external end part of the arms 15, 16 is connected with discharge valves 19, 20 of the solvent, and the solvent supplied from the solvent supply openings 14a, 14b passes through the slits 17, 18 and is discharged from the discharge valves 19, 20 of the solvent.;COPYRIGHT: (C)1996,JPO