Entry electricity value decisive manner null

摘要

PURPOSE: To rapidly determine the target temperature profiles of a plurality of electric heaters. ;CONSTITUTION: Respective temperature deviations are determined from target temperatures r₁, r₂, r₃ of a sample 2, and temperatures Y₁(K), Y₂(K), Y₃(K) provided corresponding to electric heaters 3-1, 3-2, 3-3, and one-stage differences of the respective deviations are determined from each temperature deviation and the temperature deviation before one point of time. The powers and weights corresponding to each temperature deviation and the one-stage difference of temperature deviation are selected, and return powers U₁, U₂, U₃ to be fed back to power supply lines 12-1, 12-2, 12-3 for supplying power to each electric heater 3-1, 3-2, 3-3 are determined from the selected powers and weights. The return powers U₁, U₂, U₃ are subtracted from the selected powers U₁₀, U₂₀, U₃₀ determined on the basis of the target temperatures r₁, r₂, r₃ of the sample 2 to determine input powers U₁, U₂, U₃ to be given to each electric heater 3-1, 3-2, 3-3.;COPYRIGHT: (C)1993,JPO&Japio