ELECTRON EMISSION BODY AND MANUFACTURING METHOD THEREFOR, COLD CATHODE FIELD ELECTRON EMISSION ELEMENT AND MANUFACTURING METHOD THEREFOR, AND COLD CATHODE FIELD ELECTRON EMISSION DISPLAY DEVICE AND MANUFACTURING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a cold cathode field electron emission element having a structure hardly causing damage to an electron emission part carbon nanotube or the like.;SOLUTION: This cold cathode field electron emission element comprises a cathode electrode 11 provided on a support body 10; an insulation layer 12 formed on the support body 10 and the cathode electrode 11; a gate electrode 13 formed on the insulation layer 12; opening parts 14A, 14B formed in the gate electrode 13 and the insulation layer 12; and an electron emission part 15 formed on a portion of the cathode electrode 11 positioning in a bottom part of the opening part 14B. The electron emission part 15 comprises a matrix 21, and a carbon nanotube structure 20 embedded in the matrix 21 in a projecting state of the tip part.;COPYRIGHT: (C)2003,JPO