Semiconductor device provided with a planar magnetic element and a method for manufacturing the same, and planar magnetic element

摘要

PROBLEM TO BE SOLVED: To provide a flat magnetic element for flat inductors, plane transformers, etc. ;SOLUTION: A flat magnetic element is constituted by laminating an insulating layer and magnetic material layer upon a flat coil in which the groove section between adjacent coil conductors has a groove aspect ratio (thickness of coil conductors/interval between coil conductors) of ≥1. When this magnetic element is used in a flat inductor, the Q-value of the inductor can be improved and, when this element is used in a transistor, the gain and voltage regulation of the transformer can be improved. This magnetic element is also suitable as an element for an integrated circuit and can greatly contribute to the size reduction and thickness reduction of the electronic equipment.;COPYRIGHT: (C)2001,JPO