Production manner null of thermoelectric boundary discharge electron gun and emitter for thermoelectric boundary discharge electron gun

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a thermoelectric field emission electron gun which can stably carry out electron emission for a long time with narrow energy distribution of the electron beam emitted at high brightness and provide a method for manufacturing an emitter for the thermoelectric field emission electron gun. SOLUTION: A laminated electron emitting face 12 is formed on the tip end part of an emitter 10 by laminating several to some tens of concentric disk-like layers with approximately 0.01-0.2nm thickness (d). Once formed, the laminated electron emitting face 12 is not eliminated within a life (normally about 5000 hours or longer until the coated ZrO is consumed) of the thermoelectric field emission electron gun since the radius r of the emitter tip end is approximately 2-4m. Moreover, since the emitted tip end part is made to be laminated structure, the electric field intensity is moderated and since the emitted electron density distribution becomes uniform emitted electron density distribution, the mutual effect of electrons is weakened and the energy distribution width E is narrowed.