Low-vacuum gas-discharge electron guns on the basis of high voltage glow discharge

摘要

Investigation results of the proposed methods of rise of pressure in low-vacuum gas-discharge electron guns based on the high voltage glow discharge with a hollow anode are presented. The influence of design parameters, cathode material, and sort of the technological gas on working pressure is considered. The possibility of low-vacuum gas-discharge electron guns operation in the medium and low vacuum at pressure in the range of 10-1000 Pa is proved.