Magnetic microscopic method and scanning transmission electron microscopy using a scanning electron

摘要

PURPOSE: To produce a distinct image even when a specimen in which change in the spatial distribution of the electromagnetic field differs largely, is to be observed by combining a slit for separating the interferential striation with a sensor to sense the position and intensity of an electron beam having passed the surface of the specimen. ;CONSTITUTION: An electron beam 4 fed from an electron source 1 under a vacuum is converged on the surface 6 of a specimen by an irradiation lens 5 and deflected into a scan using a deflecting coil 3. The deflection is made by receiving a Rolents force with the electromagnetic field of the specimen. The deflecting amount is sensed by a sensor 10, and the position and intensity of the deflection are calculated by a signal calculation circuit 12. On the basis of the obtained deflection signal 13, a computer 17 determines the magnetism distribution image. Thereby a scanning transmissive electron microscope is used in the scanning Rorents electron microscopic mode. When this is to be used in the scanning interferential electron microscopic mode, a switch 16 of a by-prism 2 is turned on through a control circuit 15, and a slit 9 is inserted to the electron path 11. Thereby the electron beam 2 is separated into two pieces, and the sensor 10 performs sensing upon formation of an interferential striation after passage of the specimen surface 6.;COPYRIGHT: (C)1995,JPO