METHOD OF FORMING PERIODICAL POLARIZATION INVERSION STRUCTURE, PERIODICAL POLARIZATION INVERSION STRUCTURE, AND OPTICAL WAVEGUIDE ELEMENT

摘要

PROBLEM TO BE SOLVED: To prevent a ferroelectric single crystal from being damaged due to voltage application when forming a periodical polarization inverting structure in a ferroelectric single crystal substrate by applying a voltage between a first electrode provided on one surface of the substrate and a second electrode provided on the substrate so as to face the first electrode.;SOLUTION: The first electrode is provided with an electrode piece array body 32 consisting of a plurality of periodically arrayed electrode pieces 2, a feeding electrode 1 for feeing the electrode pieces 2, and a probing pad connected to the feed electrode 1. A wider piece part 7 having a width wider than that of the electrode pieces 2 is provided in a terminal part 1b on the side opposite to the probing pad of the feed electrode 1.;COPYRIGHT: (C)2003,JPO