DETECTION METHOD FOR SUPPORTING POSITION OF SUBSTRATE- SUPPORTING PIN, DETECTING METHOD FOR ITS INCLINATION, AND TEACHING DEVICE AND TEACHING JIG THEREFOR

摘要

PROBLEM TO BE SOLVED: To teach a supporting position of a substrate-supporting pin to a transport arm by automatically detecting it, and to detect inclination of the supporting position.;SOLUTION: A composite plate, in which a center disc 6 can be separated relatively upward from a doughnut-shaped plate 7 surrounding it, is prepared as a teaching jig 5. The doughnut-shaped plate 7 is provided with optical sensors 8 and 9 that detect the presence of the center disc 6. A transfer arm 28 holds a peripheral part of the teaching jig 5 to transfer it to the upper part of a mounting pedestal. The transfer arm 28 and a supporting pin 80 are relatively moved, to mount the disc 6 on the supporting pin 80. Further, the disc 6 is moved for the optical sensors 8 and 9 by an amount which exceeds the thickness of the disc. Based on the change in the output signal of the optical sensors 8 and 9 at this time, the supporting positions and the inclinations of three supporting pins 80 are detected.;COPYRIGHT: (C)2003,JPO