Optical thin film, optical component formed with this optical thin film, antireflection film, and plastic optical component formed with this antireflection film

摘要

PURPOSE:To obtain a film which can be easily formed with good productivity by using a conventional device and has enough adhesion property and excellent resistance against heat cycles without causing deterioration in surface accuracy of a substrate. CONSTITUTION:An antireflection film for plastic optical parts is formed in such a manner that the film contains at least one lays containing at least one of MoO3 and WO3. It is preferable that the first layer in the substrate side is a Si oxide layer having =2nm optical thickness and that one of the second and other layers consists of at least one of MoO3 and WO3. Further, at least one of MoO3 and WO3 may be mixed with other dielectric material to obtain the material for vapor deposition of optical films.