METHOD OF MANUFACTURING MASTER DISK FOR OPTICAL DISK, METHOD OF MANUFACTURING STAMPER FOR OPTICAL DISK, STAMPER FOR OPTICAL DISK, AND METHOD OF MANUFACTURING MOLDED RESIN FOR OPTICAL DISK, AND MOLDED SUBSTRATE FOR OPTICAL DISK

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a master disk for an optical disk which can stably form patterns below the diameter of a convergent beam for exposure with decreased fluctuations in shape by using a simple apparatus.;SOLUTION: The method of manufacturing the master disk for the optical disk has a process step of forming a lower layer 12 consisting of a non-photosensitive hydrophilic polymeric material on a substrate 11, a process step of forming an upper layer 13 consisting of a photosensitive resin on this lower layer, a process step of forming a latent image 16 by exposing the upper layer 13 by the first light 14 formed by condensing a laser beam, a process step of forming the patterns by the exposure on the upper layer 13 by developing and cleaning with pure water, a process step of etching the lower layer 12 subjected to the cleaning with the pure water by irradiating the layer with the second light 17 from the upper layer side, and a process step of peeling the upper layer 13 used as a mask, in which the second light 17 to be cast to the substrate surface includes a wavelength from 220 to 320 nm and the maximum intensity of the light below 200 nm is below 1/40 the maximum intensity of the light of 220 to 320 nm.;COPYRIGHT: (C)2003,JPO