MANUFACTURING METHOD FOR FeTaN SOFT MAGNETIC THIN FILM FOR MAGNETIC ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method for a FeTaN soft magnetic thin film for a magnetic element.;SOLUTION: The manufacturing method is based on comprising a stage of providing a substrate for thin film formation at a spot isolated from an Fe target by a prescribed distance; a stage of mounting a plurality of Ta small pieces on a surface of the Fe target, turning the Fe target to a cathode and the substrate to an anode to apply the DC voltage of a prescribed size between two electrodes under a prescribed pressure of an argon/nitrogen gaseous mixture and forming a FeTaN thin film on the substrate by a sputtering system, and a stage of postheating the FeTaN thin film, so as to form fine crystal grains inside the formed FeTaN thin film. Methods of forming a Ti-based layer, below the FeTaN thin film and elevating a temperature of the substrate, instead of post-heating or the like, are introduced.;COPYRIGHT: (C)2003,JPO