METHOD OF PROTECTING RESIST NOZZLE AGAINST DRYNESS, DRYNESS PREVENTING POT, AND ITS POSITIONING METHOD AND POSITIONING JIG

摘要

PROBLEM TO BE SOLVED: To prevent the tip of a resist nozzle from being dried up and to restrain the gel of resist liquid or the dry pigment of color resist liquid from depositing on a glass substrate.;SOLUTION: A dryness preventing pot 13 is formed in the shape of a rectangular box with an open top surface and larger than a resist nozzle 11. When the resist nozzle 11 is arranged at a standby position, its tip is put into the dryness preventing pot 13. A resist liquid solvent S is kept in the dryness preventing spot 13, and a resist guide 14 extending in parallel with the tip of the resist nozzle 11 is also provided inside the dryness preventing pot 13. The resist guide 14 is tapered upward so as to have a pointed tip (upper end). Resist liquid is periodically extruded from the resist nozzle 11 so as to prevent the tip of the resist nozzle 11 from being clogged with the dried resist liquid.;COPYRIGHT: (C)2003,JPO