MOTOR DRIVE, STAGE, ALIGNER, DEVICE MANUFACTURED BY THE ALIGNER, AND METHOD OF MANUFACTURING THE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a low cost, small volume, and light-weight motor drive, to provide a stage using the motor drive, an aligner using the stage, and a device manufactured by the aligner, and to provide a method of manufacturing the device. SOLUTION: In a motor drive of a linear motor utilizing a PWM method, a capacitor 64 is inserted between a constant voltage power supply 61 and a PWM drive circuit 62. As the maximum supply current of the constant voltage power supply 61 is smaller than a drive current necessary for the acceleration of the linear motor, the drive current for the acceleration of the linear motor is supplemented by the capacitor 64 inserted.