ALUMINUM NITRIDE SUBSTRATE, ALUMINUM NITRIDE SUBSTRATE HAVING THIN FILM, AND SUBMOUNT MATERIAL FOR LASER LIGHT- EMITTING ELEMENT OBTAINED BY USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an aluminum nitride substrate having a via hole in which the falling-off of crystal particles is prevented, and to provide an aluminum nitride substrate having a thin film having high reliability in connection.;SOLUTION: The aluminum nitride substrate having the via hole is characterized in that an electroconductive part mainly composed of tungsten or molybdenum is provided at the via hole, and 15 to 30 pieces of the crystal particles of the aluminum nitride are present on the straight line having the length of 50 μm. The aluminum nitride substrate having the thin film is characterized in that an electroconductive film is formed on one surface or both surfaces of the aluminum nitride substrate. The submount material for the laser light- emitting element is obtained by using the aluminum nitride substrate having the thin film.;COPYRIGHT: (C)2003,JPO