AIRTIGHTNESS INSPECTION METHOD OF VESSEL AND AIRTIGHTNESS INSPECTION DEVICE OF VESSEL

摘要

PROBLEM TO BE SOLVED: To provide an airtightness inspection method of a vessel and an airtightness inspection device of the vessel, not only capable of performing accurate inspection but also having excellent treating efficiency of inspection and having a comparatively simple device constitution for inspection.;SOLUTION: In this airtightness inspection device 1 of the vessel, the quality of airtightness of the sealed vessel 2 is inspected. The device is equipped with an airtight inspection vessel 3 for storing the whole vessel 2, a pressure changing means 4 connected to the inspection vessel 3, for changing the internal pressure of the inspection vessel 3, and a deformation detection means 5 for detecting the deformation of the vessel 2 stored in the inspection vessel 3.;COPYRIGHT: (C)2003,JPO