AIRTIGHTNESS INSPECTION DEVICE, AIRTIGHTNESS INSPECTION METHOD AND METHOD FOR MANUFACTURING AIRTIGHT PRODUCT

摘要

PROBLEM TO BE SOLVED: To provide an airtightness inspection device, performing continuous measurement without deterioration of measuring accuracy while eliminating a waiting time until the following measurement.;SOLUTION: The device comprises: a master chamber 11 as an airtight container for storing a master work Wm known as a product free from leak; an inspection chamber 12 as an airtight container for storing an inspection object work Wt that is a product to be inspected; a high-pressure gas supply part 13 for supplying a high-pressure gas to the master chamber 11 and the inspection chamber 12; and a pressure difference measurement part 14 for measuring a pressure difference between the master chamber 11 and the inspection chamber 12. The master chamber 11 includes a cooling means 15 for cooling the master work Wm stored in the master chamber 11.;COPYRIGHT: (C)2009,JPO&INPIT