Airtight inspection device, airtight inspection system and airtightness inspection method of piezoelectric vibration device

摘要

Problem to be solved: to provide an airtight inspection apparatus, an airtightness inspection system and an airtightness inspection method of a piezoelectric vibration device capable of checking airtightness with the same inspection accuracy regardless of the package size.The airtightness inspection apparatus 200 performs airtightness inspection on a piezoelectric vibration device in which a vibrating portion in which a pair of excitation electrodes are formed is sealed in a package.The airtightness inspection apparatus 200 includes a chamber 220 capable of changing the internal pressure in the state where the piezoelectric vibration device is accommodated, and a measuring portion 230 capable of measuring the oscillation frequency of the piezoelectric vibration device in the state in which the internal pressure of the chamber 220 is changed.In the airtightness inspection method using the airtightness inspection apparatus 200, it is possible to determine whether or not airtightness failure in the piezoelectric vibration device is based on the change in the output of the measuring portion 230 in the state in which the internal pressure of the chamber 220 is changing.Diagram