METHOD OF SHRINKING GRAIN SIZE OF TUNGSTEN SILICIDE, MULTILAYER STRUCTURE OF TUNGSTEN SILICIDE, AND TWO-LAYER STRUCTURE OF TUNGSTEN-SILICIDE CRYSTALLINE GRAINS

摘要

PROBLEM TO BE SOLVED: To provide a novel method of shrinking the grain size of tungsten silicide, which can shrink the grain size of tungsten silicide, a multilayer structure of tungsten silicide, and a two-layer structure of tungsten-silicide crystalline grains. ;SOLUTION: This multilayer structure of tungsten silicide is constituted by forming a first tungsten-silicide layer on a semiconductor substrate, a first intermediate layer on the first tungsten-silicide layer, and a second tungsten- silicide layer on the first intermediate layer.;COPYRIGHT: (C)2003,JPO