SPHERICAL SURFACE COPY GRINDING-POLISHING METHOD AND SPHERICAL SURFACE COPY GRINDING-POLISHING DEVICE

摘要

PROBLEM TO BE SOLVED: To stabilize the spherical center position of machining to improve shape transferability and surface accuracy by controlling the temperature of a machining fluid so as to be kept constant. ;SOLUTION: This spherical surface copy grinding-polishing device has a polishing plate 4 for polishing the spherical surface of a polished object; a rotating means 5 for holding and rotating the polishing plate 4; a holding means 13 for rotatably holding the rotating means 5; a rocking means 16 for putting the polishing plate 4 in rocking motion; a machining fluid supply means for supplying a machining fluid to the polishing face of the polishing plate 4; a pressurizing means 25 for pressuring the polished object in the spherical center direction of the polishing plate while holding the polished object rotatably; and a control means for controlling the temperature of the machining fluid.;COPYRIGHT: (C)2003,JPO