A method is provided for etching quaternary interface layers of InxGa1−xAsyP1−y which are formed between layers of GaAs and InGaP in heterojunction bipolar transistors (HBTs). In accordance with the method, the interface is exposed by etching the GaAs layer with an etchant that is selective to InGaP. The interface is then etched with a dilute aqueous solution of HCl and H2O2 that is selective to InGaP. The controlled etching provided by this methodology allows HBTs to be manufactured with more sophisticated, near ideal designs which may contain multiple GaAs/InGaP interfaces.
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机译:提供了一种刻蚀In x Sub> Ga 1− x Sub> As y Sub> P 1− y Sub>的四元界面层的方法它们在异质结双极晶体管(HBT)中的GaAs和InGaP层之间形成。根据该方法,通过用对InGaP具有选择性的蚀刻剂蚀刻GaAs层来暴露界面。然后用对InGaP有选择性的HCl和H 2 Sub> O 2 Sub>的稀水溶液蚀刻该界面。这种方法提供的受控蚀刻使HBT可以采用更复杂,接近理想的设计制造,其中可能包含多个GaAs / InGaP界面。
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